| 摘要 |
PURPOSE: A cluster tool with a heating unit is provided to reduce an area occupied by the cluster tool by not requiring an additional chamber for heating a substrate. CONSTITUTION: A roller unit is arranged in a chamber. A plurality of rollers are constantly arranged on the same plane. A roller driver is connected to a plurality of rollers. A cluster tool includes a first chamber module(100), a second chamber module(200), a third chamber module(300), and a fourth chamber module.
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