摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator that has simple structuring and a high transmission efficiency of displacement, and can accurately displacing an object to be displaced, while enlarging the displacement amount of the object to be displaced. <P>SOLUTION: A piezoelectric actuator 1 has a support substrate 3, its body 13, including a first piezoelectric laminate 7, a second piezoelectric laminated body 9, and a displacement part 11 and a first elastic body 15. The first elastic body 15 is fixed to its body 13, such that it connects the lower surfaces 7RD and 7TD of the first piezoelectric laminate 7, the lower surfaces 9RD and 9TD of the second piezoelectric laminate 9, the side surface 7S of the first piezoelectric laminate 7, and the side surface 9S of the second piezoelectric laminate 9; the first to fourth region 15A, 15B, 15C, and 15D of the first elastic body 15 are fixed to the principal surface 3M of the support substrate 3 by the first to fourth bonding parts 5A, 5B, 5C, and 5D, and the non-bonding surface 15R is not fixed to the principal surface 3M of the support substrate 3. <P>COPYRIGHT: (C)2011,JPO&INPIT |