| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer module such that the rigidity of a transfer chamber can be enhanced. SOLUTION: The transfer chamber 14 which can be evacuated is provided with a lid 22 in an openable/closable state. A robot 12 is mounted in the transfer chamber 14. The robot 12 has hollow rotary shafts 36, 37 at a part of a mechanism which transfers a workpiece W. A column 28 which supports the lid 22 in a closed state is arranged in the hollow rotary shafts 36, 37 of the robot 12. Since the column 28 bears a load applied on the lid 22 due to the atmospheric pressure, the lid 22 is can be reduced in thickness to lower the manufacturing cost. Moreover, the column 28 does not become an obstacle, when the robot swivels the workpiece W around the rotary shafts 36, 37 or is moved it in a radial direction. COPYRIGHT: (C)2011,JPO&INPIT
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