发明名称 LIGHT IRRADIATION DEVICE AND LIGHT IRRADIATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a light irradiation device that can efficiently cure an adhesive layer of an adhesive sheet, and to provide a light irradiation method. SOLUTION: The light irradiation device irradiates the adhesive sheet S which is moving with line light beams L1 to L19 extending in a direction crossing the moving direction of the adhesive sheet S. With this configuration, irradiation efficiency can be improved as compared with a configuration for irradiation with light from an LED without convergence, and the adhesive is efficiently cured to save energy. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010287814(A) 申请公布日期 2010.12.24
申请号 JP20090141949 申请日期 2009.06.15
申请人 LINTEC CORP 发明人 KAWASAKI YOSHIHIKO
分类号 H01L21/301;H01L33/00 主分类号 H01L21/301
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