| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate backup device supporting various kinds of substrates different in width approximately without gaps.SOLUTION: The substrate backup device 2 forms a substrate supporting area F for supporting a lower surface of a substrate B because upper surfaces of a plurality of backup pieces 20 connect in a juxtaposed direction of the backup pieces 20. At least one pair of backup pieces 20 adjacent in the juxtaposed direction among the plurality of backup pieces 20 are adjusting backup pieces 200F and 200R. Upper surface rims of the adjusting backup pieces 200F and 200R have contacts 200Fa and 200Ra where both ends (a), (b), (c) and (d) in an orthogonal direction which is a horizontal direction approximately orthogonal to the juxtaposed direction, are shifted from one another in the juxtaposed direction. Through the change of the length of a contact section 202 with which the pair of contacts 200Fa and 200Ra come into contact, a width L1 in the juxtaposed direction of the substrate supporting area F is adjusted. |
