| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate ejecting mechanism for ejecting substrates one by one without using a suction.SOLUTION: The substrate ejecting mechanism is a mechanism for gripping and ejecting the uppermost substrate among a plurality of laminated substrates, and is equipped with: first and second arm members 86, 88 mutually oppositely supported by a support body 97; an arm driving means 96 for moving the second arm member 88 so as to be close to or away from the first arm member 86; and first and second grip members 98, 110 mounted on the first and second arm members 86, 88. The first grip member 98 is equipped with a first slope 102 inclined toward an upper part and the second arm member 88, and the second grip member 88 is equipped with a second slope 114 inclined toward an upper part and the first arm member 86. |
