发明名称 POSITION ALIGNING METHOD FOR DISCHARGE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method of aligning an impact position with a discharge port in a discharge device.SOLUTION: The discharge device 10 has a substrate moving part 20 movable in a first direction, a head holding part 30 holding a plurality of heads 32, a moving camera 21 and a plurality of fixed cameras 31. At first, the discharge port 35 which the head 32 possesses is photographed by the moving camera 21 and the relative alignment of each head 32 is carried out by an individual head position correcting means. Next, a plurality of substrate reference points on the substrate 50 are photographed by the fixed cameras 31 and the substrate 50 is rotated and moved by a substrate rotation mechanism 42 so that the plurality of the substrate reference points are parallel to a second direction. Next, the head holding part 30 is moved to the aligning direction by a prescribed distance by a head moving mechanism. The alignment is carried out by the steps so that the prescribed impact position on the substrate 50 is passed just under the prescribed discharge port 35.
申请公布号 JP2011000517(A) 申请公布日期 2011.01.06
申请号 JP20090144129 申请日期 2009.06.17
申请人 ULVAC JAPAN LTD 发明人 INOUE YUYA;NAMEKAWA TAKUMI;BABA MEGUMI;HANE KOJI;MAEKAWAHARA HIROMI
分类号 B05C5/00;B05C11/10;G01B11/00;G02B5/20 主分类号 B05C5/00
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