| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic heater which is inexpensive and has high corrosion resistance. <P>SOLUTION: The ceramic heater 100 includes: a ceramic base body 105 having an electrode pad 121 electrically connected with a heat-generation reactor 141; and a joint part 131 electrically connected with the electrode pad 121 via a brazing material part 124 disposed on the surface of the electrode pad 121, wherein a nickel-boron plated film 125 with which the surface of a brazing material part 124 and the surface of the electrode pad 121 are integrally covered in order to secure corrosion resistance is formed with a plurality of layers having a thickness of 6 μm or more and composed of a first plating layer 126 and a second plated layer 127. Therein, the thickness of the first plated layer 126 is made smaller than the thickness of the second plated layer 127, thereby, the adhesiveness with a base is improved, stress in the plating is reduced, swelling, peeling or the like is suppressed and, at the same time, the corrosion resistance is secured. <P>COPYRIGHT: (C)2011,JPO&INPIT |
