发明名称 LIGHTING SYSTEM
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a lighting system for improving the accuracy of temperature control of an optical member transmitting illumination light without blocking an optical path of the illumination light emitted by a light source. <P>SOLUTION: The lighting system (100) includes a light source section (140) for emitting illumination light, a light-transmitting member (160) for transmitting the illumination light emitted from the light source section, a moving mechanism (150) for moving the light source section in the optical axis direction of the illumination light with respect to the light-transmitting member, a measurement unit (190) having a temperature sensor that receives radiation light radiated from the light-transmitting member and measures the temperature of the light-transmitting member based on the amount of the received light, and a measurement unit movable section (170) for displacing at least a portion of the measurement unit in response to the presence position of the light source section in the moving direction so that the radiation light radiated from the light-transmitting member enters the temperature sensor regardless of the presence position of the light source section in the moving direction. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011022424(A) 申请公布日期 2011.02.03
申请号 JP20090168230 申请日期 2009.07.16
申请人 NIKON CORP 发明人 YAMADA NAOTO
分类号 G03B15/05;F21L4/00;F21S2/00;F21V14/02;F21V23/00;F21Y101/00;G03B15/02;G03B15/03 主分类号 G03B15/05
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