| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a dicing apparatus capable of preventing contamination from remaining at an irregularity portion or a specific position of a workpiece. <P>SOLUTION: A plurality of nozzles 71A-71F are mounted on a work-table 31 for placing the workpiece W at regular intervals along the outer periphery. For each of the nozzles, timings of starting and stopping spraying cleaning solvent are individually controlled by a controller. For the controller, by selecting the nozzles for spraying cleaning solvent and controlling the timings of starting and stopping the spraying according to a change in a processing position of the workpiece W, a flow direction of the cleaning solvent flowing on the workpiece W is changed according to the working position of the workpiece W. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
