发明名称
摘要 <p>A method of manufacturing an electron-emitting device includes a first step of forming a conductive film on an insulating layer having an upper surface and a side surface connected to the upper surface via a corner portion so as to extend from the side surface to the upper surface and cover at least a part of the corner portion, and a second step of etching the conductive film. At the first step, the conductive film is formed so that film density of a portion on the side surface of the insulating layer becomes lower than film density of a portion on the corner portion of the insulating layer.</p>
申请公布号 JP4637233(B2) 申请公布日期 2011.02.23
申请号 JP20080324465 申请日期 2008.12.19
申请人 发明人
分类号 H01J9/02 主分类号 H01J9/02
代理机构 代理人
主权项
地址