LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

摘要

PURPOSE: A lithography device and a method for operating the same are provided to eliminate contaminants in the lithography device by feeding emulsified cleaning liquid to the lithography device. CONSTITUTION: A mixer(300) mixes additive fluid and immersed liquid in order to form emulsified cleaning liquid. A sensor system detects the physical property of the emulsified cleaning liquid. A controller(200) is in connection with the mixer and the sensor system. The controller controls the physical property of the emulsified cleaning liquid and provides the additive fluid to the mixer.