发明名称 SELF-ASSEMBLED FILM PRODUCING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a self-assembled film production method capable of substantially shortening monolayer formation time and being applied to a large-area substrate as well. <P>SOLUTION: By applying the solution of an organic compound having a phosphonic acid group or a carboxylic acid group on at least one end of a molecule to a substrate surface by a spray method and washing and drying the substrate thereafter, the self-assembled film is formed on the large-area substrate. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011072922(A) 申请公布日期 2011.04.14
申请号 JP20090227403 申请日期 2009.09.30
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE& TECHNOLOGY 发明人 ISHIDA TAKAO
分类号 B05D7/24;B05D1/02;C23C14/08;H01L31/04;H01M14/00 主分类号 B05D7/24
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