发明名称 |
SELF-ASSEMBLED FILM PRODUCING METHOD |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a self-assembled film production method capable of substantially shortening monolayer formation time and being applied to a large-area substrate as well. <P>SOLUTION: By applying the solution of an organic compound having a phosphonic acid group or a carboxylic acid group on at least one end of a molecule to a substrate surface by a spray method and washing and drying the substrate thereafter, the self-assembled film is formed on the large-area substrate. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
申请公布号 |
JP2011072922(A) |
申请公布日期 |
2011.04.14 |
申请号 |
JP20090227403 |
申请日期 |
2009.09.30 |
申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE& TECHNOLOGY |
发明人 |
ISHIDA TAKAO |
分类号 |
B05D7/24;B05D1/02;C23C14/08;H01L31/04;H01M14/00 |
主分类号 |
B05D7/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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