摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for producing a crystal, capable of growing a group III nitride crystal to a practical size for use in fabricating optical devices or electronic devices such as high-performance light-emitting diodes and LDs. SOLUTION: The apparatus for producing a crystal includes: a reaction vessel 101 containing a raw material; a feed pipe 108 feeding a gas forming a crystal by reacting with the raw material into the reaction vessel; a heater 111 disposed around the reaction vessel 101; and an outer vessel 112 covering the heater 111 and the reaction vessel 101. COPYRIGHT: (C)2011,JPO&INPIT |