| 摘要 |
PROBLEM TO BE SOLVED: To eliminate necessity of carrying in/out a panel board for effective transfer when transferring the panel board one after another to a plurality of stages. SOLUTION: A substrate-transfer conveyor 30 to transfer a liquid crystal cell 1 includes a plurality of transfer belts 31, and a negative pressure chamber 40 is formed with a negative pressure tubing 41 connected in the lower position of the transfer belt 31A installed in the position closest to the processing-objective region of the liquid crystal cell 1. The negative pressure chamber 40 has a length long enough to extend from a carrying-in stage 10 to a final bonding stage 13, and covered by the transfer belt 31A. Suction holes 42 are bored in the transfer belt 31A with a predetermined pitch interval, and are opened onto the transfer surface of the transfer belt 31A. When the liquid crystal cell 1 is placed on the transfer belt 31A, negative pressure suction force is activated in the liquid crystal cell 1 through the suction hole 42. COPYRIGHT: (C)2011,JPO&INPIT
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