发明名称 Lateral oxidation with high-K dielectric liner
摘要 Disclosed are methods of making and using a high-K dielectric liner to facilitate the lateral oxidation of a high-K gate dielectric, integrated circuit structures containing the high-K dielectric liner and/or oxidized high-K gate dielectric, and other associated methods.
申请公布号 US7932150(B2) 申请公布日期 2011.04.26
申请号 US20080124794 申请日期 2008.05.21
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 WATANABE TAKESHI;IIJIMA RYOSUKE
分类号 H01L21/336 主分类号 H01L21/336
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