FILM FORMING METHOD, FILM FORMING DEVICE, AND STORAGE MEDIUM,申请号KR20087025943-传众专利搜索

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发明名称	FILM FORMING METHOD, FILM FORMING DEVICE, AND STORAGE MEDIUM
摘要
申请公布号	KR101031677(B1)	申请公布日期	2011.04.29
申请号	KR20087025943	申请日期	2007.04.10
申请人		发明人
分类号	H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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