AN APPARATUS FOR MONITORING OF THE DEPOSITION OF METALLIC FILMS

摘要

A blank crystal is sandwiched between two electrodes in a holder in a manner such that the only contact of the electrodes with the crystal is along the outer circumference of the crystal. A preliminary evaporation of metal onto the exposed surface of the crystal establishes the desired initial resonant frequency of the crystal. A substrate is then placed in the evaporation chamber proximate the crystal and a metal film is vapor deposited on the substrate and crystal until the resonant frequency of the crystal changes by a predetermined amount. The crystal holder is designed to provide easy removal of the crystal therefrom, thereby facilitating reclamation of the crystal after metal film buildup thereon by removing the crystal from the holder and dipping the crystal in a suitable metal etchant solution.