发明名称 PROBE DEVICE, MEASURING DEVICE, AND INSPECTION APPARATUS
摘要 PROBLEM TO BE SOLVED: To simplify a circuit configuration, and to reduce occurrence of operation failure. SOLUTION: The probe device includes: a probe pin 21 abutting on conductor patterns 101 (101a-101e); and a discharge section 200 for performing discharge treatment for discharging charge accumulated in the conductor patterns 101 via the probe pin 21. The discharge section 200 includes: a conductive plate 23 arranged movably so that an inner surface 31 of an insertion hole 23a is made to contact and separate from the probe pin 21 while the insertion hole 23a capable of inserting the probe pin 21 is formed and the probe pin 21 is inserted into the insertion hole 23a and connected to reference potential; and a moving mechanism 24 for moving the conductive plate 23 to allow the probe pin 21 to contact and separate from the inner surface 31. The moving mechanism 24 is configured to execute discharge treatment by allowing the probe pin 21 to abut on the inner surface 31 while the probe pin 21 is in contact with the conductor pattern 101. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011089860(A) 申请公布日期 2011.05.06
申请号 JP20090242923 申请日期 2009.10.22
申请人 HIOKI EE CORP 发明人 SATO YOSHINORI
分类号 G01R31/28;G01R1/06 主分类号 G01R31/28
代理机构 代理人
主权项
地址