发明名称 |
Method of detecting defects on an object |
摘要 |
A method for detecting defects on an object includes an illumination optical unit which obliquely projects a laser focused onto a line on a surface of the object and white-color, a table unit which mounts the specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from the object and passed through a filter which blocks diffraction light resulting from patterns formed on the object, a signal processor which processes a signal outputted from the image sensor of the detection optical unit to extract defects of the object, and a display unit which displays information of defects extracted by the signal processor. The filter is adjustable.
|
申请公布号 |
US7940383(B2) |
申请公布日期 |
2011.05.10 |
申请号 |
US20090630307 |
申请日期 |
2009.12.03 |
申请人 |
HITACHI, LTD.;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
NOGUCHI MINORI;OHSHIMA YOSHIMASA;NISHIYAMA HIDETOSHI;MATSUMOTO SHUNICHI;KEMBO YUKIO;MATSUNAGA RYOUJI;SAKAI KEIJI;NINOMIYA TAKANORI;WATANABE TETSUYAI;NAKAMURA HISATO;JINGU TAKAHIRO;MORISHIGE YOSHIO;CHIKAMATSU SHUICHI |
分类号 |
G01N21/00;G01N21/94;G01N21/95;G01N21/956;G01R31/308;H01J37/00;H01L21/00;H01L21/66;H01L21/68 |
主分类号 |
G01N21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|