| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin film which has a high refractive index to a laser beam of short wavelength than a ZrS based thin film, has excellent thermal impact resistance, also has high stability to heat and can be deposited by a deposition process with high efficiency such as d.c. sputtering. <P>SOLUTION: The titanium oxide based thin film essentially consists of titanium oxide and comprises niobium oxide as an auxiliary component, whose refractive index to light of 400 nm wavelength is ≥2.5, and also has an amorphous structure. The titanium oxide based thin film is, e.g., used for an optical recording medium. <P>COPYRIGHT: (C)2011,JPO&INPIT |
