发明名称 |
PLASMA TEMPERATURE CONTROL APPARATUS AND PLASMA TEMPERATURE CONTROL METHOD |
摘要 |
The plasma temperature control apparatus includes a plasma generating section 40 that turns a plasma-generating gas into plasma, and a plasma-generating gas temperature control section 30 that controls the temperature of the plasma-generating gas supplied to the plasma generating section 40. The temperature of the plasma generated in the plasma generating section 40 is controlled by controlling the temperature of the plasma-generating gas. |
申请公布号 |
KR20110056393(A) |
申请公布日期 |
2011.05.27 |
申请号 |
KR20117006844 |
申请日期 |
2009.09.03 |
申请人 |
OKINO AKITOSHI;MIYAHARA HIDEKAZU |
发明人 |
OKINO AKITOSHI;MIYAHARA HIDEKAZU |
分类号 |
H05H1/46;H05H1/24 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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