发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR CHIP WITH ADHESIVE LAYER, AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor chip with a thin adhesive layer, which enables miniaturization of a semiconductor device. SOLUTION: The manufacturing method for the semiconductor chip with the adhesive layer includes an applying process of applying an adhesive composition 40 containing a solvent to another surface of a semiconductor wafer 10 having a circuit on its one surface, an adhesive layer forming process of eliminating the solvent on the semiconductor wafer 10 to form the adhesive layer, and a cutting process of cutting the semiconductor wafer 10 having the adhesive layer 40 formed thereon to obtain semiconductor chips with the adhesive layers. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011108730(A) 申请公布日期 2011.06.02
申请号 JP20090259858 申请日期 2009.11.13
申请人 HITACHI CHEM CO LTD 发明人 KAWAMORI TAKASHI;MITSUKURA KAZUYUKI;MASUKO TAKASHI;KATOGI SHIGEKI;FUJII SHINJIRO
分类号 H01L21/52 主分类号 H01L21/52
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