PRESSING DEVICE, FILM-FORMING APPARATUS PROVIDED WITH THE SAME, AND FILM-FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To solve a problem that a film-forming pattern blurs and a film-forming position deviates due to the gap between a film-forming mask and a substrate, which is produced in four corners of an opening of a mask frame due to a difference between deflected shapes of each of the film-forming mask and a substrate, when a film is formed on the substrate by using the film-forming mask fixed in the mask frame in such a state that tension is applied to the film-forming mask. SOLUTION: A pressing device to be used has a pressing member which presses the substrate to be film-formed onto the film-forming mask in the four corners of the opening of the mask frame. COPYRIGHT: (C)2011,JPO&INPIT