| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid control valve capable of suppressing oscillation of fluid pressure, while suppressing degradation in pressure controllability. SOLUTION: The fluid control valve 10 includes a bottom plate 12, a body 14, and a cover 16. The body 14 has an inlet port 18 and an outlet port 20, and the inlet port 18 can communicate with the outlet port 20 through an upstream fluid chamber 22 and a downstream fluid chamber 24. The valve element 26 communicates/shuts off between the upstream fluid chamber 22 and the downstream fluid chamber 24. The valve element 26 has a shaft 30, and a flexible film part 28 connected to the shaft 30, and a spring receiving member 39 is assembled to an end on a bottom plate 12 side of the shaft 30. The spring receiving member 39 has an substantially columnar small-diameter part 39b, and a restriction part 12a of the bottom plate 12 formed in an annular shape is disposed on an outer peripheral side of the small-diameter part 39b. A predetermined clearance 48 is disposed between the small-diameter part 39b and the restriction part 12a, and the clearance 48 is filled with grease 50 for vacuum. COPYRIGHT: (C)2011,JPO&INPIT
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