CERAMIC HEATER AND APPARATUS FOR PROCESSING A BOARD INCLUDING THE SAME,申请号KR20080003843-传众专利搜索

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发明名称	CERAMIC HEATER AND APPARATUS FOR PROCESSING A BOARD INCLUDING THE SAME
摘要
申请公布号	KR101041069(B1)	申请公布日期	2011.06.13
申请号	KR20080003843	申请日期	2008.01.14
申请人		发明人
分类号	H01L21/687	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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