| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To determine the coordinates of the shape measurement data of a surface under measurement with respect to an object under measurement with high precision. <P>SOLUTION: The interference measuring method includes: a mark formation process (S1); a shape measuring process (S2); a mark detection process (S3); and a coordinates calculation process (S4). In the S1 mark formation process, a reference mark is formed on the surface under measurement of the object under measurement. In the mark detection process, the position of the standard mark with the coordinate system of an area sensor as a reference is detected from the shape measurement data obtained in the shape measuring process. In the coordinates calculation process, the correspondence between the position information of the reference mark with the coordinate system of the object under measurement formed in the mark formation process as a reference and the position information of the reference mark with the coordinate system of the area sensor detected in the mark detection process as the reference is determined. On the basis of the correspondence, calculation for converting the shape measurement data obtained in the shape measuring process into the coordinate system of the object under measurement is performed. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
