DROP-DOWN TOOL AND METHOD OF MANUFACTURING THE SAME, TOOL, METHOD OF HIGHLY PRECISELY APPLYING AND DRYING FUNCTIONAL MATERIAL, VACUUM DEPOSITION METHOD, AND METHOD OF MANUFACTURING HIGHLY ADVANCED SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a tool capable of securing positioning accuracy while absorbing the warp of an organic sensor substrate and securing horizontal accuracy, being commonly used from coating to drying in order to form a functional material at a prescribed position and capable of applying vacuum process such as plasma treatment, vapor deposition and sputtering and having high throughput. SOLUTION: The drop-down tool is obtained by laminating a drop-down substrate having a drop-down part for guiding and dropping down an organic substrate to be coated with a functional material and dried to a prescribed holding position and an adhesion holding layer holding the parallelism of the organic substrate dropped down in the drop-down part. The tool has a drop-down tool having a recessed part fitted to a projecting part in the dropping tool and a base tool having the projecting part fitted to the recessed part provided to the drop-down tool to place and fix the drop-down tool. COPYRIGHT: (C)2011,JPO&INPIT