发明名称 |
METHOD FOR CUTTING JOINED GLASS, METHOD FOR MANUFACTURING PACKAGE, PACKAGE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC EQUIPMENT AND RADIO-CONTROLLED CLOCK |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for cutting joined glass which suppresses the generation of crushes and chippings upon cutting of the joined glass, and can cut the joined glass per prescribed size, a method for manufacturing a package, a package, a piezoelectric vibrator, an oscillator, electronic equipment and a radio-controlled clock. <P>SOLUTION: The method includes: a scribing step of emitting a laser beam of an absorption wavelength in a wafer joined body 60 along a contour to form a scribe line M' on a wafer 50 for a lid substrate; and a breaking step of cutting the wafer joined boy 60 by applying fracture stress along the scribe line M' to divide the wafer joined body 60 into a plurality of piezoelectric vibrators. The cutting step is performed in such a manner that the wafer joined body 60 is placed on a silicone rubber 71, and the outside edge face 50b in the wafer 50 for a lid substrate is turned toward the silicone rubber 71. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
申请公布号 |
JP2011121817(A) |
申请公布日期 |
2011.06.23 |
申请号 |
JP20090280899 |
申请日期 |
2009.12.10 |
申请人 |
SEIKO INSTRUMENTS INC |
发明人 |
NUMATA SATOSHI;FUKUDA JUNYA |
分类号 |
C03B33/07;B23K26/38;B23K26/40;B28D5/00;C03B33/09 |
主分类号 |
C03B33/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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