| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inkjet print head front or a nozzle plate with a super-oleophobic surface. <P>SOLUTION: A first material 14 that achieves selective etching without eroding a silicon substrate 12 is provided on the silicon substrate 12 and a second material 16 that achieves selective etching without eroding the silicon substrate 12 or the first material 14 is deposited. The etching prepares a textured silicon substrate (left side) with a pillar or a groove array 18, or a textured silicon surface (right side) with a pillar with an overhang bent structure 20 or the groove array 18. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
