| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce a physical size of a flow velocity detecting part to measure a micro flow rate by inexpensive constitution. <P>SOLUTION: A sensor part 9 and electrode pads P1-P6 for taking out a signal are formed on an upper face of a sensor chip 10. The electrode pads P1-P6 for taking out the signal are connected to an external circuit via not a bonding wire but a wiring board 18. The wiring board 18 is formed with contact pads connected to the electrode pads P1-P6 for taking out the signal, electrode pads for connecting the external circuit connected to electrode pins T1-T6 of a header part 12, and a wiring pattern for connecting the contact pads and the electrode pads for connecting the external circuit. A rectangular opening 18-1 is provided in the wiring board 18, and the sensor part 9 is precluded from being covered to serve as a flow passage for a fluid of a measuring object. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
