| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the measurement accuracy of a reticule CD in an integrated circuit manufacturing process. SOLUTION: A method is for measuring a specified position on the surface of an object by using a digital camera constituted of many pixels. A measurement area is set on the surface of the object (301), photographing is performed for two or more times by using the digital camera while discretely moving the set measurement area to the object and a plurality of images are obtained (303). Gray levels in a plurality of the images are classified into prescribed stages and the number of pixels included in the respective gray levels classified into the prescribed stages is counted (304). The arithmetic mean of the counted number of the pixels is calculated (305) and the calculated mean value is defined as a final measured value.</p> |
