| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an electrode and a device of manufacturing a photoelectric conversion element improving the characteristics of the photoelectric conversion element by annealing a back electrode portion and a back passivation film at mutually different optimum temperatures. <P>SOLUTION: In the method of manufacturing the electrode, when an aluminum alloy part 6 is formed as an alloy layer of p-type silicon with aluminum at least on a back electrode forming part 4 on a back surface of a p-type silicon substrate 2 that constitutes a solar cell 1 which is provided with the passivation film 3 on the opposite side of a light receiving side, annealing is performed by covering the back surface with a mask 12 which is opened only for the back electrode forming part 4, whereby the annealing temperatures of the passivation film 3 and the aluminum alloy part 6 are optimized to improve the characteristics of the solar cell. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
