ELECTRON SOURCE, ELECTRON GUN, ELECTRON MICROSCOPE DEVICE USING THE SAME, AND ELECTRON BEAM LITHOGRAPHY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electron source which can reduce a work function of an electron emission surface rather than a currently-used Zr/O/W electron source and can attain emitted electrons with narrow energy width and high current density and has longer lifetime, an electron microscope which can attain high resolution image for a short period, and an electron beam lithography device having high throughput.

SOLUTION: In the electron source provided with a needle electrode 104 made of a metal wherein a pointed head is made at a needle-shape, and a heating element 103 for heating the needle electrode, the electron source has a diffusion source which can be heated with the heating element 103, and the a mixture of a barium compound containing oxygen and carbon particles is set up to be a diffusion source 106.

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