发明名称 LIGHT IRRADIATION DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To synthesize light from a second light source while not reducing the volume of light emitted from a first light source, relating to a light irradiation device which guides the light of the second light source into a region where no light from a first light source is present, and synthesizes it with the light from the first light source. <P>SOLUTION: A through hole is formed at a flat surface mirror reflecting the light from the first light source toward an integrator in such a region of low radiation intensity as surrounded with a region where the light from the first light source is irradiated, and the light from the second light source is guided through the through hole. The second light source is, for example, a laser diode, and the light from the laser diode is guided through the through hole from the rear surface side of the flat mirror using fiber. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011165784(A) 申请公布日期 2011.08.25
申请号 JP20100025126 申请日期 2010.02.08
申请人 USHIO INC 发明人 NAKADA SHIGENORI
分类号 H01L21/027;G02B19/00;G03F7/20 主分类号 H01L21/027
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