发明名称 |
METHOD AND STRUCTURE FOR DC AND RF SHIELDING OF INTEGRATED CIRCUIT |
摘要 |
PROBLEM TO BE SOLVED: To provide a method and structure for the DC and RF shielding of an integrated circuit. SOLUTION: A method for electromagnetically shielding circuits combined to form an integrated circuit device provides isolated silicon islands where the lateral direction and the lower side of the islands are surrounded by a conductive material. COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2011176339(A) |
申请公布日期 |
2011.09.08 |
申请号 |
JP20110084505 |
申请日期 |
2011.04.06 |
申请人 |
AGERE SYSTEMS GUARDIAN CORP |
发明人 |
IVANOV TONY G;CARROLL MICHAEL S;RANBIA SING |
分类号 |
H01L21/76;H01L21/02;H01L21/762;H01L21/822;H01L23/52;H01L23/528;H01L23/552;H01L23/66;H01L27/04;H01L27/12 |
主分类号 |
H01L21/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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