发明名称 METHOD AND STRUCTURE FOR DC AND RF SHIELDING OF INTEGRATED CIRCUIT
摘要 PROBLEM TO BE SOLVED: To provide a method and structure for the DC and RF shielding of an integrated circuit. SOLUTION: A method for electromagnetically shielding circuits combined to form an integrated circuit device provides isolated silicon islands where the lateral direction and the lower side of the islands are surrounded by a conductive material. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011176339(A) 申请公布日期 2011.09.08
申请号 JP20110084505 申请日期 2011.04.06
申请人 AGERE SYSTEMS GUARDIAN CORP 发明人 IVANOV TONY G;CARROLL MICHAEL S;RANBIA SING
分类号 H01L21/76;H01L21/02;H01L21/762;H01L21/822;H01L23/52;H01L23/528;H01L23/552;H01L23/66;H01L27/04;H01L27/12 主分类号 H01L21/76
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