| 摘要 |
PROBLEM TO BE SOLVED: To provide a humidifying apparatus and a humidifying method for use in combination with a lithographic apparatus, and a method for manufacturing a device.SOLUTION: Disclosed is a humidifying apparatus in which gas is supplied to a first side of a membrane and liquid is supplied to a second side of the same membrane. The membrane is non-porous with respect to the liquid but porous with respect to the vapor of the liquid and liquidphilic with respect to the liquid. |
