DYNAMIC QUANTITY SENSOR AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor that can be manufactured at low cost and can detect the magnitude, direction, and acceleration of an outside force, and to provide a method of manufacturing the dynamic quantity sensor.SOLUTION: This dynamic quantity sensor includes: a first substrate; a fixed part disposed on the top of the first substrate; a spiral-shaped movable electrode which is disposed at a separation from the first substrate and one end of which is supported by the fixed part; fixed electrodes disposed around the movable electrode in directions in which to detect dynamic quantities; a first terminal electrically connected to the fixed part, and a second terminal electrically connected to the fixed electrode.