| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor optical device capable of suppressing deterioration of device characteristics.SOLUTION: A Mach-Zehnder type optical modulation device 1A is provided with optical waveguides 10, 20, an incident side optical demultiplexer 30, and an emission side optical multiplexer 40. Each of the optical waveguide 10, the optical waveguide 20, the incident side optical demultiplexer 30, and the emission side optical multiplexer 40 has a lower clad layer, a core layer, an intermediate semiconductor layer, and an upper clad layer laminated in order on an n-type semiconductor substrate 2. Each upper clad layer of optical waveguide regions 11, 13 of the optical waveguide 10, optical waveguide regions 21, 23 of the optical waveguide 20, the incident side optical demultiplexer 30, and the emission side optical multiplexer 40 comprise a semi-insulating semiconductor. |
