| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid pump device reducing a power loss generated when a check valve for performing exhaust at an intermediate stage is opened, and also achieving easy regulation so that the power loss is minimized even in opening/closing the check valve.SOLUTION: A check valve storage chamber 41 is connected to a third pump chamber 13 as the intermediate stage of a vacuum pump 1 through an internal passage 36, and the bypassing check valve 42 is stored inside of the check calve storage chamber 41. A suction amount restriction member 51 as a member formed separately from a communication hole 33 is detachably provided in the communication hole 33 as a part of a transfer passage allowing the third pump chamber 13 to communicate with a fourth pump chamber 14. The suction amount restriction member 51 restricts the amount of gas transferred from the third pump chamber 13 to the fourth pump chamber 14 by a restriction hole 51b. |
