| 摘要 |
PROBLEM TO BE SOLVED: To more easily adjust an internal pressure of an air cylinder disposed in a measuring device.SOLUTION: A probe 26 for measuring the shape of a specimen is fixed to an air cylinder 62, and the probe 26 is moved by vertical movement of an operation section 63 of the air cylinder 62 by a linear actuator. An upper space 65 and lower space 66 are disposed inside the operation section 63, and the balance of force vertically applied to the operation section 63 is adjusted by adjusting the air injection amount to the upper space 65. The air injection amount to the upper space 65 is determined based on the value of driving current supplied to the linear actuator for moving the operation section 63. This drive device can be applied to a shape measuring device. |
