| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of carrying out cross-sectional processing and cross-sectional observation without taking out a sample in the atmosphere.SOLUTION: At the time of ion processing, a second installed part 34 of a sample holder 22 is installed on a holder installation part 16. Then, a sample portion 41 projected from an edge portion 42 of a shielding material 40 is etched by ion beams. Thereafter, a sample stage is arranged on an optical axis of an electronic optical system and the sample cross-section 50 appeared by ion etching is observed by SEM. On the other hand, when the sample surface 45 is observed by SEM, a first installed part 31 of the sample holder is installed on the holder installation part 16. |
