发明名称 INKJET TYPE COATING APPARATUS
摘要 PROBLEM TO BE SOLVED: To make an ink pressure negative at a nozzle of each inkjet head while simplifying an ink supplying system for a plurality of inkjet heads.SOLUTION: An inkjet type coating apparatus having a plurality of inkjet type coating heads 20 arranged in a predetermined direction, and ejecting a coating liquid supplied from a supply source as liquid droplets from nozzles of the coating heads 20 to coat a substrate comprises: a supply-branching tank 40 provided over an arrangement range of a plurality of the coating heads 20 along the predetermined direction upward of a plurality of the coating heads 20, and containing a coating liquid; a plurality of supply pipes 50 branched to each of a plurality of the coating heads 20 from the supply-branching tank 40, and supplying the coating liquid in the supply-branching tank 40 to each of the coating heads 20; and a pressure adjusting means 70 allowing a pressure of a space in the supply-branching tank 40 to be adjusted.
申请公布号 JP2011206739(A) 申请公布日期 2011.10.20
申请号 JP20100079286 申请日期 2010.03.30
申请人 SHIBAURA MECHATRONICS CORP 发明人 IKUTA AKIRA;HARA AKIRA;TSURUOKA YASUJI
分类号 B05C11/10;B05C5/00 主分类号 B05C11/10
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