| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an interference objective lens having a structure that can improve the workability by expanding the selection range of an object to be measured which can be measured/observed, and a light interference measuring device including the interference objective lens. <P>SOLUTION: An interference objective lens 30 for irradiating a measurement target W with light from a light emission part 10 includes an interference optical system 100 at an end of the interference objective lens 30. The interference optical system 100 includes a lens group 130 for converging the light from the light emission part 10 to the measurement target W, a reference mirror 120 provided between the light emission part 10 and the lens group 130, and a half mirror 140 provided at the center in an optical axis L direction of the lens group 130 for separating the light from the light emission part 10 into a reference optical path and a measurement optical path and output the reflectance from the reference optical path and the measurement optical path as interfering light. The lens group 130 is structured so that one side and the other side thereof with respect to the optical axis L direction are symmetrical along the half mirror 140. <P>COPYRIGHT: (C)2012,JPO&INPIT |
