| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a MEMS device and the like which can reduce cost and a mounting area, shortens a start time and output a clock with high frequency accuracy. <P>SOLUTION: A MEMS device 100 outputs at least one of a first clock signal 400 and a second clock signal 402. The device includes a first MEMS oscillator 300 having a first MEMS resonator 302 and a second MEMS oscillator 320 having a second MEMS resonator 322 mounted on the same substrate. A first resonance frequency which is a resonance frequency of the first MEMS oscillator almost agrees with a second resonance frequency which is a resonance frequency of the second MEMS oscillator. A Q value of the first MEMS resonator is different from a Q value of the second MEMS resonator. The first MEMS oscillator outputs a first clock signal having a frequency which is the first resonance frequency and the second MEMS oscillator outputs a second clock signal having a frequency which is the second resonance frequency. <P>COPYRIGHT: (C)2012,JPO&INPIT |
