| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angle velocity sensor element which can balances in the horizontal direction during drive vibration and generates less unnecessary signal. <P>SOLUTION: In the angular velocity sensor element of the present invention, the under surface of an upper substratum and the top surface of a lower substratum are jointed, and an upper drive part 23, 24 and an upper detection part 25 with respect to the upper substratum 22 and a lower drive part 27, 28 and a lower detection part 29 with respect to the lower substratum 26 are symmetrically arranged to each other. <P>COPYRIGHT: (C)2012,JPO&INPIT |
