BAND NARROWING LASER DEVICE

摘要

PROBLEM TO BE SOLVED: To solve various problems by controlling stably a spectral purity width (a spectral index value) without influence on center wavelength control to thereby control an apparent spectral purity width.

SOLUTION: Spectral purity width measuring means measures a spectral purity width E95 of a laser beam emitted from an amplification laser device. Discharge timing from when an oscillation laser device starts to discharge till when the amplification laser device starts to discharge is then controlled so that the measured spectral purity width E95 falls within an allowable width E950±dE95 of a target spectral purity width E950, thereby allowing stable control of the spectral purity width E95.

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