| 摘要 |
<P>PROBLEM TO BE SOLVED: To increase a maximum available pressure. <P>SOLUTION: A gas analyzer includes: an ionization section 211 which ionizes a sample gas and has an opening part 211A for leading the ion to the outside; an ion drawing electrode 212 provided outside of the opening part 211A of the ionization section 211 for drawing the ion; a quadrupole part 213 for selectively passing the ion led from the ionization section by the ion drawing electrode 212; and an ion detection section 214 for detecting the ion passed through the quadrupole part 213. An opening size of the opening part 211A of the ionization section 211 is made smaller than a virtual inscribed cicle IC inscribed to all four pole electrodes 213P constituting the quadrupole part 213. <P>COPYRIGHT: (C)2012,JPO&INPIT |
