Method for fabricating chromeless phase shift mask,申请号KR20080087475-传众专利搜索

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发明名称	Method for fabricating chromeless phase shift mask
摘要
申请公布号	KR101095678(B1)	申请公布日期	2011.12.19
申请号	KR20080087475	申请日期	2008.09.04
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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