| 摘要 |
<P>PROBLEM TO BE SOLVED: To surely detect holding failure of a film and downsize a film peeling device. <P>SOLUTION: The protective film peeling device 10 includes a peeling unit peeling an end of the film adhering to a plate-like body off the plate-like body, and a holding unit 3 holding the end of the film peeled by the peeling unit. The holding unit 3 is provided with a holding wall 31 and a holding part 32 pinching the end of the peeled film. The holding wall 31 has a suction hole 31b for taking the air in. The holding part 31 has a through-hole 32c penetrating the holding part 31. When the holding wall 31 and the holding part 32 pinch the end of the film, a central axis of the through-hole 32c concentrically overlaps with a central axis of the suction hole 31b. <P>COPYRIGHT: (C)2012,JPO&INPIT |
